Polymer Engineering Faculty Research
Title
Dynamics, Diffusion, and Dissolution in Ultrathin Photoresist Films
Document Type
Article
Publication Date
Fall 2004
Recommended Citation
Vogt, Bryan, "Dynamics, Diffusion, and Dissolution in Ultrathin Photoresist Films" (2004). Polymer Engineering Faculty Research. 1097.
https://ideaexchange.uakron.edu/polymerengin_ideas/1097
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