Polymer Engineering Faculty Research
Title
Measurements towards the materials sources of line edge roughness in chemically amplified photoresists
Document Type
Article
Publication Date
Fall 2006
Recommended Citation
Vogt, Bryan, "Measurements towards the materials sources of line edge roughness in chemically amplified photoresists" (2006). Polymer Engineering Faculty Research. 1087.
https://ideaexchange.uakron.edu/polymerengin_ideas/1087
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