"Electrostatic Micromembrane Actuator Arrays as Motion Generator" by X. T. Wu, J. Hui et al.
 

Mechanical Engineering Faculty Research

Title

Electrostatic Micromembrane Actuator Arrays as Motion Generator

Document Type

Article

Publication Date

2004

Abstract

A rigid-body motion generator based on an array of micromembrane actuators is described. Unlike previous microelectromechanical systems(MEMS) techniques, the architecture employs a large number (typically greater than 1000) of micron-sized (10–200 μm) membrane actuators to simultaneously generate the displacement of a large rigid body, such as a conventional optical mirror. For optical applications, the approach provides optical design freedom of MEMSmirrors by enabling large-aperture mirrors to be driven electrostatically by MEMS actuators. The micromembrane actuator arrays have been built using a stacked architecture similar to that employed in the Multiuser MEMS Process (MUMPS), and the motion transfer from the arrayed micron-sized actuators to macro-sized components was demonstrated.

Publication Title

Applied Physics Letters

Volume

84

Issue

22

First Page

4418

Share

COinS