Title

Energy Dispersive X-ray Microanalysis of Phosphosilicate Glasses (Psg)

Document Type

Article

Publication Date

8-1980

Abstract

EDS peak height ratio method has been used for chemical microanalysis of PSG samples in a scanning electron microscope. We have applied a no-standard inverse ZAF-type correction procedure to calculate working curves as a function of beam energy and take-off angle. With the obtained correction procedure the EDS measurement is fast, precise and accurate compared with other physical techniques. Using this method a proportional relationship has been verified between the PH3/SiH4 ratio of the CVD process and the P concentration of the deposited PSG layer.

Publication Title

Acta Physica Academiae Scientiarum Hungaricae

Volume

49

Issue

3

First Page

133

Last Page

140

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