Energy Dispersive X-ray Microanalysis of Phosphosilicate Glasses (Psg)
EDS peak height ratio method has been used for chemical microanalysis of PSG samples in a scanning electron microscope. We have applied a no-standard inverse ZAF-type correction procedure to calculate working curves as a function of beam energy and take-off angle. With the obtained correction procedure the EDS measurement is fast, precise and accurate compared with other physical techniques. Using this method a proportional relationship has been verified between the PH3/SiH4 ratio of the CVD process and the P concentration of the deposited PSG layer.
Acta Physica Academiae Scientiarum Hungaricae
Toth, A. L. and Puskas, Judit, "Energy Dispersive X-ray Microanalysis of Phosphosilicate Glasses (Psg)" (1980). Chemical and Biomolecular Engineering Faculty Research. 499.