Document Type
Article
Publication Date
12-6-2004
Abstract
Parallel pattern transfer of submicrometer-scale oxide features onto zirconium nitride thin films is reported. The oxidation reaction was verified by Auger microprobe analysis and secondary ion mass spectrometry. Oxide features of similar to70 nm in height can be formed and selectively etched in a dilute aqueous hydrogen fluoride solution. This provides an interesting route to potential new applications for high-melting point, biocompatible surfaces that possess small feature sizes with controlled geometries. (C) 2004 American Institute of Physics.
Publication Title
Applied Physics Letters
Volume
85
Issue
23
First Page
5691
Last Page
5693
Recommended Citation
Farkas, N.; Comer, J. R.; Zhang, G.; Evans, Edward A.; Ramsier, R. D.; Wight, S.; and Dagata, J. A., "Parallel Writing on Zirconium Nitride Thin Films by Local Oxidation Nanolithography" (2004). Chemical, Biomolecular, and Corrosion Engineering Faculty Research. 7.
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