Polymer Engineering Faculty Research

Title

Direct measurement of the spatial extent of the in situ developed latent image by neutron reflectivity

Document Type

Article

Publication Date

Fall 2007

Abstract

The spatial distribution of polymer photoresist and deuterium labeled base developer highlights a fraction of the line edge that swells but does not dissolve. This residual swelling fraction remains swollen during both the in situ aqueous hydroxide dissolution development and water rinse steps uncovering that the final lithographic feature is resolved by a collapse mechanism during the drying step. These new insights into the mechanism of lithographic feature formation were enabled by contrast variant neutron reflectivity methods with nanometer resolution.

Volume

25

First Page

2514

Last Page

2520