Electrostatic Micromembrane Actuator Arrays as Motion Generator
A rigid-body motion generator based on an array of micromembrane actuators is described. Unlike previous microelectromechanical systems(MEMS) techniques, the architecture employs a large number (typically greater than 1000) of micron-sized (10–200 μm) membrane actuators to simultaneously generate the displacement of a large rigid body, such as a conventional optical mirror. For optical applications, the approach provides optical design freedom of MEMSmirrors by enabling large-aperture mirrors to be driven electrostatically by MEMS actuators. The micromembrane actuator arrays have been built using a stacked architecture similar to that employed in the Multiuser MEMS Process (MUMPS), and the motion transfer from the arrayed micron-sized actuators to macro-sized components was demonstrated.
Applied Physics Letters
Wu, X. T.; Hui, J.; Young, M.; Kayatta, P.; Wong, J.; Kennith, D.; Zhe, Jiang; and Warde, C., "Electrostatic Micromembrane Actuator Arrays as Motion Generator" (2004). Mechanical Engineering Faculty Research. 1001.