Chemical and Biomolecular Engineering Faculty Research

Document Type

Article

Publication Date

12-6-2004

Abstract

Parallel pattern transfer of submicrometer-scale oxide features onto zirconium nitride thin films is reported. The oxidation reaction was verified by Auger microprobe analysis and secondary ion mass spectrometry. Oxide features of similar to70 nm in height can be formed and selectively etched in a dilute aqueous hydrogen fluoride solution. This provides an interesting route to potential new applications for high-melting point, biocompatible surfaces that possess small feature sizes with controlled geometries. (C) 2004 American Institute of Physics.

Publication Title

Applied Physics Letters

Volume

85

Issue

23

First Page

5691

Last Page

5693

Included in

Chemistry Commons

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