Chemical and Biomolecular Engineering Faculty Research

Document Type

Article

Publication Date

8-15-2005

Abstract

This paper is Part I of an integrated experimental/modeling investigation of a procedure to coat nanofibers and core-clad nanostructures with thin-film materials using plasma-enhanced physical vapor deposition. In the experimental effort, electrospun polymer nanofibers are coated with aluminum under varying operating conditions to observe changes in the coating morphology. This procedure begins with the sputtering of the coating material from a target. This paper focuses on the sputtering process and transport of the sputtered material through the reactor. The interrelationships among the processing factors for the sputtering and transport are investigated from a detailed modeling approach that describes the salient physical and chemical phenomena. Solution strategies that couple continuum and atomistic models are used. At the continuum scale, the sheath region and the reactor dynamics near the target surface are described. At the atomic level, molecular-dynamics (MD) simulations are used to study the sputtering and deposition mechanisms. Ion kinetic energies and fluxes are passed from the continuum sheath model to the MD simulations. These simulations calculate sputtering and sticking probabilities that in turn are used to calculate parameters for the continuum reactor model. The reactor model determines the concentration field of the coating material. (c) 2005 American Institute of Physics.

Publication Title

Journal of Applied Physics

Volume

98

Issue

4

Included in

Chemistry Commons

Share

COinS
 
 

To view the content in your browser, please download Adobe Reader or, alternately,
you may Download the file to your hard drive.

NOTE: The latest versions of Adobe Reader do not support viewing PDF files within Firefox on Mac OS and if you are using a modern (Intel) Mac, there is no official plugin for viewing PDF files within the browser window.